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    An Overview of RF MEMS Components by Microwave Theory and Techniques

    Abstract: This paper offers with a rather new location of radio-frequency (RF) technology primarilybased on microelectromechanical systems (MEMS). RF MEMS gives a class of new devicesand components which show advanced high-frequency performance relative to standard(commonly semiconductor) gadgets, and which enable new device abilities. Further, MEMSgadgets are designed and fabricated by means of techniques much like those of very massive-scale integration, and may be synthetic through traditional batch-processing strategies. Inthis paper, the …

    Published in International Journal of Analog Integrated Circuits · Vol. 6, Issue 1, 2020 · pp. 53–60 Read article

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