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FEASIBILITY STUDIES ON A DISTILLATION CASCADE FOR PRODUCTION OF ULTRA-HIGH PURITY TRICHLOROSILANEBy Rupsha Bhattacharyya, Sanjay Mahajani, Rajesh Kumar
Abstract: Elemental silicon is the backbone of the electronics and the solar photovoltaics industry in the present times. This work examines the purification of a silicon precursor such that the total impurity content in it is limited to a few parts per million. Trichlorosilane (TCS) is one of the most important precursors in the production of electronics grade elemental silicon. This is because of the relative ease with which crude trichlorosilane, …
Published in International Journal of Chemical Separation Technology · Vol. 4, Issue 1, 2018 · pp. 19–35 Read article →